TeOx-based film for heat-mode inorganic photoresist mastering

被引：44

作者：

Ito, E ^{[1
]}

Kawaguchi, Y ^{[1
]}

Tomiyama, M ^{[1
]}

Abe, S ^{[1
]}

Ohno, E ^{[1
]}

机构：

[1] Matsushita Elect Ind Co Ltd, Storage Media Syst Dev Ctr, Kadoma, Osaka 5718501, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2005年 / 44卷 / 5B期

关键词：

mastering; phase change mastering; inorganic photoresist; heat-mode; thermal-mode; TeOx; Blu-ray Disc; ROM; BD-ROM;

D O I：

10.1143/JJAP.44.3574

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A TeOX-based inorganic photoresist was developed for mastering utilizing heat-mode recording. We discovered that the novel organic thermal isolation film markedly improved the patterning resolution of phase change mastering. We demonstrated Blu-ray Disc read only memory (ROM) mastering with a blue laser diode, using the TeOx-based photoresist and the thermal isolation film. The jitter values of a replicated disc were less than 6% at the full range of the disc. It was also proven that the mastering system is capable of recording 80 nm L/S. In addition, the mechanism of development was clarified.

引用

页码：3574 / 3577

页数：4

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