Evaluation of a surface acoustic wave motor with a multi-contact-point slider

被引:15
作者
Kurosawa, MK [1 ]
Chiba, M [1 ]
Higuchi, T [1 ]
机构
[1] Univ Tokyo, Grad Sch Engn, Dept Precis Machinery Engn, Tokyo, Japan
关键词
D O I
10.1088/0964-1726/7/3/005
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Previously, the surface acoustic wave linear motor has been demonstrated and its exact pre-load conditions investigated. Based on this previous research, multi-contact-point sliders were designed and tested. A maximum output force of 0.45 N, 450 times that obtained in preliminary experiments, was successfully obtained. Simple simulation results predicted that much larger thrust would be available by increasing the actual contact point area without changing the slider and the stator dimensions. The calculated output force was 10 N, roughly twenty times that observed experimentally. To realize the required stator texture of the contact surface, a silicon micro-machining technique or other conventional methods would be applicable.
引用
收藏
页码:305 / 311
页数:7
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