An algorithm for analyzing ellipsometric data taken with multiple angles of incidence

The equations of ellipsometry are intractable. They have not been inverted, and thus require numerical techniques for solution in all but the simplest of reflecting surface configurations. In prior work, the authors have presented algorithms for creating approximate solutions for these equations in the case of a sequence of measurements being taken at successive times. In this paper, we extend one of these algorithms to the case of readings taken at one time at multiple angles of incidence. The algorithm is described in some detail, and sample results are presented. In addition, statistical means are used to assess the reliability of the values computed.