Compliant electro-thermal microactuators

被引：33

作者：

Jonsmann, J ^{[1
]}

Sigmund, O ^{[1
]}

Bouwstra, S ^{[1
]}

机构：

[1] Tech Univ Denmark, Mikroelekt Ctr, DK-2800 Lyngby, Denmark

来源：

MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 1999年

关键词：

D O I：

10.1109/MEMSYS.1999.746894

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper describes design, microfabrication and characterisation of topology optimised compliant electro-thermal microactuators. The actuators are fabricated by a fast prototyping process using laser micromachining and electroplating. Actuators are characterised with respect to displacement, force and work, by use of image analysis. Four different actuators are presented. These actuators are capable of displacements of 30 mu m and forces of 15 mN. The most recent actuator designs function in reasonable accordance with design predictions.

引用

页码：588 / 593

页数：6

共 6 条

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[6]

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