Voxels: volume-enclosing microstructures

被引：8

作者：

Gagler, Rob ^{[1
]}

Bugacov, Alejandro ^{[1
]}

Koel, Bruce E. ^{[1
]}

Will, Peter M. ^{[2
]}

机构：

[1] Univ So Calif, Los Angeles, CA 90089 USA

[2] Univ So Calif, Inst Informat Sci, Marina Del Rey, CA 90292 USA

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2008年 / 18卷 / 05期

关键词：

Cells - Magnetic properties - Polysilicon - Silicon wafers - Surface tension;

D O I：

10.1088/0960-1317/18/5/055025

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents results on the development and fabrication of hollow 3D, programmable-volume, micro-scale, artificial, non-biological volume cells or voxels. The standardized silicon wafer processing method PolyMUMPs (R) was used to construct a variety of polysilicon devices capable of being folded from two-dimensional shapes into three-dimensional regular solids with dimensions in the order of 40 - 80 mu m per side. Folding of the devices was performed by a combination of magnetic and surface tension forces in water. Complete closure of pyramidal structures with dimensions down to 40 mu m per side was achieved, as well as folding of five-sided boxes and half-dodecahedrons (lotuses) with dimensions down to 40 mu m per side.

引用

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