Thermal characterization of liquids and polymer thin films using a microcalorimeter

被引：37

作者：

Zhang, YY ^{[1
]}

Tadigadapa, S ^{[1
]}

机构：

[1] Penn State Univ, Dept Elect Engn, University Pk, PA 16802 USA

来源：

APPLIED PHYSICS LETTERS | 2005年 / 86卷 / 03期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.1850186

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper presents an integrated microfluidic thermal sensor that can be used to characterize the thermal properties of nanoliter quantities of fluids and polymer thin films. The device consists of a polycrystalline silicon (polysilicon) heater located in close proximity to the hot junctions of p(+)-polysilicon/gold microthermopiles fabricated on a thermally isolated membrane. ac calorimetric measurements were performed by introducing a periodic heat signal using the heater and detecting the frequency-dependent thermal signal response in the presence of various fluids and polymers. The thermal conductivity of different fluids and five typical polymers used in microfabrication was measured using this device. (C) 2005 American Institute of Physics.

引用

页码：1 / 3

页数：3

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