On the applicability of Stoney's formula for calculating the mechanical stresses in thick films and coatings

被引：10

作者：

Dobrynin, AV ^{[1
]}

机构：

[1] Moscow Inst Elect Engn, Moscow, Russia

来源：

TECHNICAL PHYSICS LETTERS | 1997年 / 23卷 / 09期

关键词：

Aluminum; Molybdenum; Nitride; Mechanical Stress; Thick Film;

D O I：

10.1134/1.1261664

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The most accurate expressions for determining stresses in coatings, for example, in aluminum nitride on molybdenum, are derived. The stress curve has a characteristic shape, and for this reason it is proposed that the entire system be called a "z system." It is shown that Stoney's formula is of limited applicability, over- or underestimating the true values of the stresses. (C) 1997 American Institute of Physics. [S1063-7850(97)02109-5].

引用

页码：709 / 710

页数：2