Local coating conditions in RF-magnetron sputtering

The following paper illustrates the state of the art of the "RF-magnetron sputter technology" for tribological applications. First the parameters to determine the results of deposition are presented and second a possible way of systematical engineering of coatings for tribological applications is discussed. Exemplary spots on different influencing variables are given. The macroscopic boundary conditions of the deposition unit and the objects to coat play a similar important role as the kinematic of threedimensional functional surfaces on the objects. Further more the substrat material (of the object to coat) as well as the load bearing capacity of the coated component in a special tribological application is of special importance. The presented measuring results are extracted from the quoted reference.