Applications of electrochemical microfabrication: An introduction

被引：38

作者：

Datta, M ^{[1
]}

机构：

[1] IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Heights, NY 10598 USA

来源：

IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1998年 / 42卷 / 05期

关键词：

D O I：

10.1147/rd.425.0563

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

[No abstract available]

引用

页码：563 / 566

页数：4

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