A 100W low distortion AlGaAs/GaAs hetero-structure FET, which is the smallest package size ever reported, has been developed for TDMA and CDMA cellular base stations. The FET exhibited 100W (50 dBm) saturation output power, and 11.5dB power gain at 1dB gain compression at 2.1GHz, The third order inter-modulation distortion (IMD3) and the power added efficiency (PAE) under two-tone test condition (Delta f=1MHz) were -35 dBc and 24%, respectively at 42 dBm output power, of which level was 8 dB back-off from saturation power. To reduce the cost and the space, the size of the chip and the package were miniaturized to 1.41 x 2.6 mm(2) and 17.4 x 24.0 mm(2), respectively by lengthening the gate finger.