A novel route to control refractive index of sol-gel derived nano-porous silica films used as broadband antireflective coatings

被引:91
作者
Wu, GM [1 ]
Wang, J
Shen, J
Yang, TH
Zhang, QY
Zhou, B
Deng, ZS
Fan, B
Zhou, DP
Zhang, FS
机构
[1] Tongji Univ, Pohl Inst Solid State Phys, Shanghai 200092, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Tech Phys, Shanghai 200083, Peoples R China
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2000年 / 78卷 / 2-3期
基金
中国国家自然科学基金;
关键词
sol-gel process; silica coatings; nano-porous structure; antireflectance;
D O I
10.1016/S0921-5107(00)00529-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A relatively new method to adjust refractive index of nano-porous silica films rapidly and continuously is reported. The thin films were prepared with the base/acid two-step catalytic sol-gel process and the dip-coating method. The structure, reflective spectra and refractive index of the films were analyzed with TEM, AFM, SEM, spectrophotometer, and ellipsometery, respectively. The experimental results have shown that the base/acid two-step catalysis can adjust the refractive index of the nano-porous silica films from 1.18 to 1.42 rapidly and continuously. And a broadband antireflective coating made with the method has very low reflectance. The average reflectance of the coated glass in the solar energy spectrum decreases to 1.5% from similar to7% of the glass. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:135 / 139
页数:5
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