A phase-space-compressing, mass-selecting beamline for hyperthermal, focused ion beam deposition

被引：31

作者：

Boyd, KJ ^{[1
]}

Lapicki, A ^{[1
]}

Aizawa, M ^{[1
]}

Anderson, SL ^{[1
]}

机构：

[1] Univ Utah, Dept Chem, Salt Lake City, UT 84112 USA

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1998年 / 69卷 / 12期

关键词：

D O I：

10.1063/1.1149242

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have developed an ion beamline for hyperthermal ion-surface collisions that incorporates a phase-space compressor to improve the focusability/current density of the ion beam in the 1-10 eV deposition energy range. In essence, collisional damping is used to substantially improve the brightness of the ion source. In addition to the focusing behavior, the beamline also accomplishes mass selection, source-target pressure reduction of >10(10), confinement of the beam to avoid space charge spreading, and hyperthermal energy beam transport. For our application the requirement is moderately tight (100 s of microns) focusing at hyperthermal energies (1 - 100 eV), but the principle also be applicable to improving spot sizes/ current densities at higher energies. (C) 1998 American Institute of Physics. [S0034-6748(98)01512-3].

引用

页码：4106 / 4115

页数：10

共 66 条

[1] PERFORMANCE OF MASS-ANALYZED, LOW-ENERGY, DUAL-ION BEAM SYSTEM FOR MATERIALS RESEARCH [J].