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A new machine for planarity measurement of CCDs and mosaics of CCDs
被引：9
作者：
Ströbele, S
[1
]
机构：
[1] European So Observ, D-8046 Garching, Germany
关键词：
CCD flatness;
CCD alignment;
flatness measurement;
triangulation sensor;
laser triangulation;
D O I：
10.1023/A:1011193231663
中图分类号：
P1 [天文学];
学科分类号：
0704 [天文学];
摘要：
High quality CCD detectors are now being produced with 2048 x 4096 square pixels, each 15 mum on a side. Even larger detector areas are built with several CCDs mounted into a mosaic. To be useful in an instrument the light must be in focus on all CCDs, requiring that all CCDs in a mosaic must typically be aligned within 30 micron of a flat plane. To achieve this accuracy in many cases the measurement and correction of the CCD alignment is necessary. One way allowing a surface measurement, even when the CCD is protected by a window, is to use triangulation sensor. The principle of a triangulation sensor, its application and its implementation in a measuring machine are presented here.
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页码：151 / 156
页数：6
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