Poled polymer etalon light modulator on integrated circuits

被引：8

作者：

Harada, K

Munakata, K

Itoh, M

Yoshikawa, N

Yonezu, H

Umegaki, S

Yatagai, T

机构：

[1] Univ Tsukuba, Inst Appl Phys, Tsukubu Adv Res Alliance, Ibaraki 305, Japan

[2] Toyohashi Univ Technol, Dept Elect & Elect Engn, Toyohashi, Aichi 441, Japan

[3] Keio Univ, Fac Sci & Engn, Yokohama, Kanagawa 223, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 08期

关键词：

light modulation; Fabry-Perot etalon; polymeric material; organic material; electrooptic effect; integrated circuit; SLM;

D O I：

10.1143/JJAP.37.4393

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Electrically addressed reflective spatial light modulators with polymeric thin films are fabricated on the surface of an n-type metal-oxide-semiconductor (NMOS) chip. The use of a resonator structure is proposed to minimize the driving voltage. The developed device is composed of 1 x 5 NMOS transistors and nonlinear polymeric materials sandwiched between aluminum electrodes. The electrooptical polymer consists of disperse red 1 (DR1)-doped poly-methyl-methacrylate (PMMA). Poling was demonstrated on this chip and the light modulation was observed using a lock-in amplifier. A modulation efficiency of 2.0 x 10(-5) was obtained.

引用

页码：4393 / 4396

页数：4

共 19 条

[1] CROSS-LINKED POLED POLYMER - POLING AND THERMAL-STABILITY [J].