Formation of nanocrystals with an identical orientation in sputter-deposited Ti-Ni thin films

被引:48
作者
Kajiwara, S [1 ]
Ogawa, K [1 ]
Kikuchi, T [1 ]
Matsunaga, T [1 ]
Miyazaki, S [1 ]
机构
[1] UNIV TSUKUBA,INST SCI MAT,TSUKUBA,IBARAKI 305,JAPAN
关键词
D O I
10.1080/095008396179922
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
During the crystallization of sputter-deposited amorphous Ti-rich Ti-Ni thin films at a relatively low temperature, aggregates comprising an extremely large number of nanocrystals (10(2)-10(5)) are formed and, to our surprise, it is found that these nanocrystals have the exactly same orientation for an aggregate. The mechanism of formation of such nanocrystals is explored.
引用
收藏
页码:395 / 404
页数:10
相关论文
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