Sensor-based microassembly of hybrid MEMS devices

被引：82

作者：

Nelson, BJ ^{[1
]}

Zhou, Y ^{[1
]}

Vikramaditya, B ^{[1
]}

机构：

[1] Univ Minnesota, Dept Mech Engn, Minneapolis, MN 55455 USA

来源：

IEEE CONTROL SYSTEMS MAGAZINE | 1998年 / 18卷 / 06期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1109/37.736010

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

[No abstract available]

引用

页码：35 / 45

页数：11

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