Characterization of dcjet CVD diamond films on molybdenum

被引：15

作者：

Bahr, DF ^{[1
]}

Bucci, DV ^{[1
]}

Schadler, LS ^{[1
]}

Last, JA ^{[1
]}

Heberlein, J ^{[1
]}

Pfender, E ^{[1
]}

Gerberich, WW ^{[1
]}

机构：

[1] DREXEL UNIV,DEPT MAT ENGN,PHILADELPHIA,PA 19104

来源：

基金：

欧洲研究理事会;

关键词：

adhesion; interface; Raman spectroscopy; synthetic diamond;

D O I：

10.1016/S0925-9635(96)00567-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond films grown using a thermal plasma technique are characterized using a variety of techniques. The relationships between the chemistry, morphology, and mechanical properties are explored using microscopy, Raman spectroscopy, Anger electron spectroscopy, and X-ray photoelectron spectroscopy. The characteristics of films grown using two different nucleation enhancement techniques are shown. Films grown using high methane concentrations at the beginning of growth produce large grained columnar films, whereas films grown on substrates which have been treated with a diamond polishing step show nanocrystalline structures. Variations in sp(3) and sp(2) bonding and peak shifts are tracked through the thickness of the film, corresponding to variations in the methane concentration during growth. Stresses an measured using peak shifts and beam bending techniques. Adhesion is tested using indentations, and is shown to increase both as growth temperatures and surface roughness increase.

引用

页码：1462 / 1472

页数：11

共 17 条

[1] LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].