Light emission from nanometer-sized silicon particles fabricated by the laser ablation method

被引:122
作者
Makimura, T
Kunii, Y
Murakami, K
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1996年 / 35卷 / 9A期
关键词
silicon particle; nanostructure; laser ablation; photoluminescence; visible light emission;
D O I
10.1143/JJAP.35.4780
中图分类号
O59 [应用物理学];
学科分类号
摘要
Luminescent nanometer-sized silicon particles are fabricated by laser ablation of a silicon target in helium gas. The formation of products is found to be governed by the dynamics of the laser-ablated silicon particles in the gas. The products deposited on silicon substrates exhibit Light emission with a peak at 1.6 eV in the air, while 2.1 eV after annealing for 20 min at 800 degrees C in oxygen gas. Applying the laser ablation technique, Re demonstrate a novel technique for fabricating silicon particles embedded in a silicon dioxide film. The particles also exhibit visible light emission.
引用
收藏
页码:4780 / 4784
页数:5
相关论文
共 12 条
[1]   THE ORIGIN OF VISIBLE LUMINESCENCE FROM POROUS SILICON - A NEW INTERPRETATION [J].
BRANDT, MS ;
FUCHS, HD ;
STUTZMANN, M ;
WEBER, J ;
CARDONA, M .
SOLID STATE COMMUNICATIONS, 1992, 81 (04) :307-312
[2]   SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS [J].
CANHAM, LT .
APPLIED PHYSICS LETTERS, 1990, 57 (10) :1046-1048
[3]   3-DIMENSIONAL QUANTUM WELL EFFECTS IN ULTRAFINE SILICON PARTICLES [J].
FURUKAWA, S ;
MIYASATO, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (11) :L2207-L2209
[4]  
GEOGHEGAN DB, 1994, PULSED LASER DEPOSIT, pCH5
[5]   VISIBLE PHOTOLUMINESCENCE FROM OXIDIZED SI NANOMETER-SIZED SPHERES - EXCITON CONFINEMENT ON A SPHERICAL-SHELL [J].
KANEMITSU, Y ;
OGAWA, T ;
SHIRAISHI, K ;
TAKEDA, K .
PHYSICAL REVIEW B, 1993, 48 (07) :4883-4886
[6]  
MAKIMURA T, IN PRESS APPL SURF S
[7]   ABOVE-BAND-GAP PHOTOLUMINESCENCE FROM SI FINE PARTICLES WITH OXIDE SHELL [J].
MORISAKI, H ;
PING, FW ;
ONO, H ;
YAZAWA, K .
JOURNAL OF APPLIED PHYSICS, 1991, 70 (03) :1869-1870
[8]   TIME-AND-SPACE RESOLVED X-RAY-ABSORPTION SPECTROSCOPY OF LASER-ABLATED SI PARTICLES [J].
OHYANAGI, T ;
MIYASHITA, A ;
MURAKAMI, K ;
YODA, O .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (5A) :2586-2592
[9]   CORRELATION OF MICROSTRUCTURE AND PHOTOLUMINESCENCE FOR NANOMETER-SIZED SI CRYSTALS FORMED IN AN AMORPHOUS SIO2 MATRIX BY ION-IMPLANTATION [J].
SHIMIZUIWAYAMA, T ;
TERAO, Y ;
KAMIYA, A ;
TAKEDA, M ;
NAKAO, S ;
SAITOH, K .
NANOSTRUCTURED MATERIALS, 1995, 5 (03) :307-318
[10]   QUANTUM SIZE EFFECTS ON PHOTOLUMINESCENCE IN ULTRAFINE SI PARTICLES [J].
TAKAGI, H ;
OGAWA, H ;
YAMAZAKI, Y ;
ISHIZAKI, A ;
NAKAGIRI, T .
APPLIED PHYSICS LETTERS, 1990, 56 (24) :2379-2380