Fabrication of large-scale ultra-smooth metal surfaces by a replica technique

被引:37
作者
Diebel, J
Löwe, H
Samorí, P
Rabe, JP
机构
[1] Inst Mikrotech Mainz GmbH, D-55129 Mainz, Germany
[2] Humboldt Univ, Inst Phys, D-10115 Berlin, Germany
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2001年 / 73卷 / 03期
关键词
D O I
10.1007/s003390100935
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper describes the growth and characterization of large-scale ultra-smooth metal surfaces produced by an adapted replica technique. Making use of this method, either amorphous or crystalline masters of different materials with ultra-flat surfaces, e.g. mica, glass or polymer coatings on silicon, were coated by a physical vapor deposition (PVD) process with a thin precious-metal layer. On the top of this layer a thick Ni surface was grown by electroplating. Both the precious-metal layer and the nickel reinforcement can be stripped off from the master, and the free metal surface that is made to appear can be used as a substrate for the self-assembly of molecules, mostly via chemisorption of thiol-functionalized moieties. The use of either gold or silver layers led to films exhibiting different morphologies and roughnesses, which are all strongly influenced by the structure of the master's surface and by the conditions during the PVD-coating procedure. Utilizing mica as a master it was possible to grow Ag and Au surfaces made of ultra-smooth well-defined [111]-oriented crystals. A root mean square roughness down to 0.2 nm was measured over micrometer-sized areas by scanning tunneling microscopy. Very flat An and Ag films have been also produced using the amorphous masters.
引用
收藏
页码:273 / 279
页数:7
相关论文
共 23 条
  • [1] ALTKORN R, 1992, P SOC PHOTO-OPT INS, V1779, P88, DOI 10.1117/12.140943
  • [2] EPITAXIAL-GROWTH OF SILVER ON MICA AS STUDIED BY AFM AND STM
    BASKI, AA
    FUCHS, H
    [J]. SURFACE SCIENCE, 1994, 313 (03) : 275 - 288
  • [3] Becker E. W., 1986, Microelectronic Engineering, V4, P35, DOI 10.1016/0167-9317(86)90004-3
  • [4] SURFACE-STRUCTURE OF THIN METALLIC-FILMS ON MICA AS SEEN BY SCANNING TUNNELING MICROSCOPY, SCANNING ELECTRON-MICROSCOPY, AND LOW-ENERGY ELECTRON-DIFFRACTION
    BUCHHOLZ, S
    FUCHS, H
    RABE, JP
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02): : 857 - 861
  • [5] ATOMIC FORCE MICROSCOPE AND AUGER-ELECTRON MICROSCOPY STUDIES OF THIN-FILM ULTRASMOOTH AU-CR FILMS ON MICA
    CARMI, Y
    DAHM, AJ
    EPPELL, SJ
    JENNINGS, W
    MARCHANT, RE
    MICHAL, GM
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (05): : 2302 - 2306
  • [6] STM STUDY OF THE SURFACE-MORPHOLOGY OF GOLD ON MICA
    CHIDSEY, CED
    LOIACONO, DN
    SLEATOR, T
    NAKAHARA, S
    [J]. SURFACE SCIENCE, 1988, 200 (01) : 45 - 66
  • [7] Colchero J., 1992, Physica Status Solidi A, V131, P73, DOI 10.1002/pssa.2211310112
  • [8] Golden interfaces: The surface of self-assembled monolayers
    Delamarche, E
    Michel, B
    Biebuyck, HA
    Gerber, C
    [J]. ADVANCED MATERIALS, 1996, 8 (09) : 719 - &
  • [9] 3-DIMENSIONAL MICROFABRICATION USING SYNCHROTRON RADIATION
    EHRFELD, W
    MUNCHMEYER, D
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1991, 303 (03) : 523 - 531
  • [10] EHRFELD W, 1987, KFK NACHRICHTEN, V19, P167