Electrical characteristics of a RF-GD-OES cell

The purpose of this work is to describe, using a self-consistent two dimensional hybrid fluid-particle model, the electrical characteristics of a discharge operating ina RF-GD-OES cell. We show that, for typical operating conditions at 13.56 MHz, the discharge has a capacitive electrical behavior and that the main current component at the powered electrode is the displacement current. These results are not in agreement with previously published calculations and this point is discussed.