Piezoelectric micromachined ultrasonic transducers with thick PZT sol gel films

被引：21

作者：

Belgacem, Brahmin ^{[1
]}

Calame, Florian ^{[1
]}

Muralt, Paul ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Ceram Lab, Lausanne, Switzerland

来源：

JOURNAL OF ELECTROCERAMICS | 2007年 / 19卷 / 04期

关键词：

micromachining; piezoelectric; thin films; PZT;

D O I：

10.1007/s10832-007-9031-8

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The fabricated micro machined ultrasonic transducers (pMUT) was based on piezoelectric laminated plates operating at flexural modes. The fabricated bimorph pMUT transducers were composed of 5-layers. A 4 mu m thick lead zirconate titanate (PZT) thin film deposited by a sol-gel method was used. The piezoelectric layer exhibited a capacitance corresponding to a permitivity of epsilon(r)=1,200. The electromechanical coupling coefficient (k(2)) and quality factor (Q) were measured as k(2)=4.4% and Q=145 in air for a low frequency transducer (240 kHz). The effect of DC bias voltage on frequency and k(2) has been studied. The 16.9 MHz transducer yielded values of Q=25 in air and k(2)=3%.

引用

页码：369 / 373

页数：5

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