共 11 条
[3]
JOAMNNOPOULOS JD, 1995, PHOTONIC CRYSTALS
[4]
A review of ion projection lithography
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1998, 16 (03)
:927-957
[5]
Ming NB, 1999, ADV MATER, V11, P1079, DOI 10.1002/(SICI)1521-4095(199909)11:13<1079::AID-ADMA1079>3.0.CO
[6]
2-5
[8]
Qin D, 1998, TOP CURR CHEM, V194, P1