Silicon supported TiC films produced by pulsed laser ablation

被引：29

作者：

D'Alessio, L

Salvi, AM

Teghil, R

Marotta, V

Santagata, A

Brunetti, B

Ferro, D

De Maria, G

机构：

[1] Univ Basilicata, I-85100 Potenza, Italy

[2] CNR, Ist Mat Speciali, Potenza, Italy

[3] CNR, Ctr Termodinam Chim Alte Temp, I-00185 Rome, Italy

[4] Univ La Sapienza, I-00185 Rome, Italy

来源：

APPLIED SURFACE SCIENCE | 1998年 / 134卷 / 1-4期

关键词：

TiC coatings; surface analysis; ablation;

D O I：

10.1016/S0169-4332(98)00241-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The selection of optimal conditions for preparing TIC coatings on oriented silicon, based on PLAD technique, was carried out by applying surface analysis (SEM, EDS, XPS, image analysis) on a series of films realised under different processing conditions. Consideration were made on the film characteristics as a function of laser fluence and informations, about the physico-chemical aspects of the ablation phenomena, were obtained. (C) 1998 Elsevier Science B.V. All rights reserved.

引用

页码：53 / 62

页数：10

共 29 条

[1] THE GROWTH AND STRUCTURE OF TITANIUM-OXIDE FILMS ON PT(111) INVESTIGATED BY LEED, XPS, ISS, AND STM [J].