Rate equations and Johnson-Mehl-Avrami-Kolmogoroff method for modelling the coverage-time dependence in thin film growth at solid surfaces

被引:8
作者
Volpe, M
Tomellini, M
Fanfoni, M
机构
[1] Univ Roma Tor Vergata, Dipartimento Sci & Tecnol Chim, I-00133 Rome, Italy
[2] Univ Roma Tor Vergata, Dipartimento Fis, I-00133 Rome, Italy
[3] Ist Nazl Fis Mat, I-00133 Rome, Italy
关键词
coverage-time dependence; Johnson-Mehl-Avrami-Kolmogoroff method; rate equations; thin films;
D O I
10.1016/S0039-6028(99)00003-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A system of rate equations previously proposed in the literature [Phys. Rev. B 54 (1996) 9828] has been numerically solved. At variance with the other rate equation schemes adopted until now, as well as describing the nucleation stage, the new scheme allows one to follow the film growth to its completion. This result has been achieved thanks to the right treatment of the impingement process among the growing clusters. Moreover, the new approach also allows one to predict whether or not the nucleation can be considered as simultaneous for given growth conditions. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:L258 / L264
页数:7
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