A study of defects in ultra-thin transparent coatings on polymers

被引：17

作者：

Sobrinho, AD

Czeremuszkin, G

Latrèche, M

Wertheimer, MR ^{[1
]}

机构：

[1] Ecole Polytech, Couches Minces Grp, Montreal, PQ H3C 3A7, Canada

[2] Ecole Polytech, Dept Engn Phys, Montreal, PQ H3C 3A7, Canada

[3] Polyplasma Inc, Montreal, PQ H3T 1P1, Canada

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1999年 / 68卷 / 01期

关键词：

D O I：

10.1007/s003390050861

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We describe new techniques, based mainly on reactive ion etching (RIE) in oxygen plasma, to render visible micrometer- or sub-micrometer-sized defects in transparent barrier films on transparent polymers. These techniques can be used to characterize and better understand the origins of defects in these coatings on a microscopic scale, as well as for mapping and counting defect density on a macroscopic scale (tens of cm(2) or more).

引用

页码：103 / 105

页数：3

共 12 条

[1]

Banks B, 1988, P 4 INT S SPAC MAT S, P371

[2] Oxygen diffusion barrier properties of transparent oxide coatings on polymeric substrates [J].