共 28 条
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Cl2 plasma passivation of etch induced damage in GaAs and InGaAs with an inductively coupled plasma source
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1999, 17 (06)
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[5]
Smallest possible electromagnetic mode volume in a dielectric cavity
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IEE PROCEEDINGS-OPTOELECTRONICS,
1998, 145 (06)
:391-397