EUROMET comparison:: diameter of small ring gauges

被引：3

作者：

Neugebauer, M ^{[1
]}

Lüdicke, F ^{[1
]}

机构：

[1] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany

来源：

METROLOGIA | 2001年 / 38卷 / 03期

关键词：

Algorithms - Calibration - Interferometers - Measurement theory - Probes - Sensitivity analysis;

D O I：

10.1088/0026-1394/38/3/10

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Comparison measurements of the diameter of small ring gauges (0.1 mm to 1 mm) were carried out by six European national metrology institutes (NMIs). The participants applied different measurement principles: mechanical contacting measurement and optical measurement with respect to the projection of the inner diameter or with respect to the position of the cylinder edges. The uncertainties associated with the diameter measurement results vary considerably among the different participants, from U = 0.10 mum to U = 5 mum. In general the measurement results agree within their associated uncertainties, with the exception of the optical measurements of the position of the cylinder edges which exceed the reference values by between 10 mum and 30 mum, probably because of the lacerated edges of the ring gauges.

引用

页码：259 / 267

页数：9