Microplasmas: Sources, particle kinetics, and biomedical applications

被引：442

作者：

Iza, Felipe ^{[1
,2
]}

Kim, Gon Jun ^{[1
]}

Lee, Seung Min ^{[1
]}

Lee, Jae Koo ^{[1
]}

Walsh, James L. ^{[2
]}

Zhang, Yuantao T. ^{[2
]}

Kong, Michael G. ^{[2
]}

机构：

[1] Pohang Univ Sci & Technol, Dept Elect & Elect Engn, Pohang 790784, South Korea

[2] Loughborough Univ Technol, Dept Elect & Elect Engn, Loughborough LE11 3TU, Leics, England

来源：

PLASMA PROCESSES AND POLYMERS | 2008年 / 5卷 / 04期

基金：

英国工程与自然科学研究理事会;

关键词：

biomedical; electron-energy distribution function (EEDF); ion-energy distribution function (IEDF); microdischarges; microplasmas;

D O I：

10.1002/ppap.200700162

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Thanks to their portability and the non-equilibrium character of the discharges, microplasmas are finding application in many scientific disciplines. Although microplasma research has traditionally been application driven, microplasmas represent a new realm in plasma physics that still is not fully understood. This paper reviews existing microplasma sources and discusses charged particle kinetics in various microdischarges. The non-equilibrium character highlighted in this manuscript raises concerns about the accuracy of fluid models and should trigger further kinetic studies of high-pressure microdischarges. Finally, an outlook is presented on the biomedical application of microplasmas.

引用

收藏

页码：322 / 344

页数：23

相关论文

共 218 条

[11] Atmospheric pressure microplasma jet as a depositing tool [J].

Benedikt, J. ;

Focke, K. ;

Yanguas-Gil, A. ;

von Keudell, A. .

APPLIED PHYSICS LETTERS, 2006, 89 (25)

[12] Comment on 'Self-organization in cathode boundary layer discharges in xenon' and 'Self-organization in cathode boundary layer microdischarges' [J].

Benilov, M. S. .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2007, 16 (02) :422-425

[13] Semianalytical description of nonlocal secondary electrons in a radio frequency capacitively coupled plasma at intermediate pressures [J].

Berezhnoi, SV ;

Kaganovich, ID ;

Misina, M ;

Bogaerts, A ;

Gijbels, R .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1999, 27 (05) :1339-1347

[14] A low-power 2.45 GHz microwave induced helium plasma source at atmospheric pressure based on microstrip technology [J].

Bilgiç, AM ;

Voges, E ;

Engel, U ;

Broekaert, JAC .

JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 2000, 15 (06) :579-580

[15] A new low-power microwave plasma source using microstrip technology for atomic emission spectrometry [J].

Bilgic, AM ;

Engel, U ;

Voges, E ;

Kückelheim, M ;

Broekaert, JAC .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2000, 9 (01) :1-4

[16] Plasma lysis for identification of bacterial spores using ambient-pressure nonthermal discharges [J].

Birmingham, Joseph G. .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 2006, 34 (04) :1270-1274

[17] Plasma display panels: physics, recent developments and key issues [J].

Boeuf, JP .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2003, 36 (06) :R53-R79

[18] Field emission from carbon nanotubes:: the first five years [J].

Bonard, JM ;

Kind, H ;

Stöckli, T ;

Nilsson, LA .

SOLID-STATE ELECTRONICS, 2001, 45 (06) :893-914

[19]

BOYLE WS, 1955, PHYS REV, V97, P255, DOI 10.1103/PhysRev.97.255

[20] Antimicrobial treatment of heat sensitive materials by means of atmospheric pressure rf-driven plasma jet [J].

Brandenburg, R. ;

Ehlbeck, J. ;

Stieber, M. ;

von Woedtke, T. ;

Zeymer, J. ;

Schlueter, O. ;

Weltmann, K. -D. .

CONTRIBUTIONS TO PLASMA PHYSICS, 2007, 47 (1-2) :72-79

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