Processes development for low cost and low power consuming SnO2 thin film gas sensors (TFGS)

被引：44

作者：

Korotchenkov, GS ^{[1
]}

Dmitriev, SV ^{[1
]}

Brynzari, VI ^{[1
]}

机构：

[1] Tech Univ Moldova, Microelect Lab, Chisinau 2004, Moldova

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1999年 / 54卷 / 03期

关键词：

SnO2; thin films; gas sensitiviiy; spray pyrolysis; gas sensors; technology; construction;

D O I：

10.1016/S0925-4005(99)00017-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

In this report results of investigations aimed at the design of topology acid manufacturing technology of SnO2 gas sensitive thin films and low cost gas sensors with low power consuming and high gas sensitivity are presented. The requirements for the parameters of gas sensitive thin films have been formulated. Gas sensitive properties of SnO2 thin films deposited by spray pyrolysis method from alcohol and water solutions are discussed. The simple construction of the gas sensitive chip of TFGS have been described and low cost technology for its realization have been proposed. Operation parameters of the created TFGS have demonstrated the efficiency of proposed decisions. Manufactured low cost TFGS had high sensitivity to various gases such as CO, CH4 and H-2 (gamma to 10(3) and more) and low consuming power (50-100 mW). (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：202 / 209

页数：8

共 18 条

[1]

BRYNZARI V, 1994, J OPTOELECTRONICA RO, V2, P173

[2]

BRYNZARI V, 1995, P 20 INT C MICR NIS, V2, P585

[3] INFLUENCE OF SURFACE PARAMETERS AND DOPING ON THE SENSITIVITY AND ON THE RESPONSE-TIMES OF TIN OXIDE RESISTIVE SENSORS [J].

BUTTA, N ;

MELLI, M ;

PIZZINI, S .

SENSORS AND ACTUATORS B-CHEMICAL, 1990, 2 (02) :151-161

[4]

CHOPRA KL, 1982, PHYS THIN FILMS, V12, P168

[5]

DEXIVRY O, 1987, HIGH TECHN CERAMICS, P1709

[6]

DMITRIEV S, 1995, P 20 INT C MICR NIS, V2, P589

[7]

DULNEV GN, 1968, TEPTOOHMEN RADIOETEC, P288

[8] PHYSICAL THEORY OF SEMICONDUCTOR SURFACES [J].

GARRETT, CGB ;

BRATTAIN, WH .

PHYSICAL REVIEW, 1955, 99 (02) :376-387

[9] SNO2 SENSORS - CURRENT STATUS AND FUTURE-PROSPECTS [J].

GOPEL, W ;

SCHIERBAUM, KD .

SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) :1-12

[10] RELATIONS BETWEEN STRUCTURAL AND ELECTRONIC-PROPERTIES OF SNO2 POLYCRYSTALLINE THIN-FILMS PREPARED BY THE AEROSOL MOCVD TECHNIQUE [J].

IVASHCHENCO, AI ;

KARYAEV, EV ;

KHOROSHUN, IV ;

KIOSSE, GA ;

MOSHNYAGA, VT ;

PETRENCO, PA .

THIN SOLID FILMS, 1995, 263 (01) :122-126

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