Reel to reel continuous formation of Y-123 coated conductors by IBAD and PLD method

被引:52
作者
Iijima, Y [1 ]
Kakimoto, K [1 ]
Kimura, M [1 ]
Takeda, K [1 ]
Saitoh, T [1 ]
机构
[1] Fujikura Ltd, Koto Ku, Tokyo 1358512, Japan
关键词
Y-123 coated conductors; ion-beam-assisted deposition (IBAD); pulsed laser deposition (PLD);
D O I
10.1109/77.919649
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Continuous deposition of Y-123 tapes was performed by Ion-Beam-Assisted Deposition (IBAD) and Pulsed Laser Deposition (PLD) method, YSZ template films were deposited by IBAD on NI-based alloy tapes with tape shifting speeds of 0.1-0.3 m/h. They were uniformly coated with an In-plane mosaic spread of 12-13 degrees in 5 m length. In order to overcome low deposition rate of IBAD process, large area ion sources with inductively coupled discharge plasma were applied. Y-123 films were deposited by PLD on the YSZ templates with tape shirting speed of 1.0 m/h. The degradation of Y-123 targets for PLD process were effectively restricted by combined motion of rapid rotation and linear shifting. I, of 84.0 A and J(c) of 0.76MA/cm(2) were obtained at 77K, 0T In the length of 1.0 m with in-plane mosaic spread for the Y-123 film was 7 degrees. I-c of 35.0 A and J(c) of 0.25MA/cm(2) were obtained, in a 4.6 m long sample at the length of 4.0 m, with inplane mosaic spread for the Y-123 film was 11 degrees.
引用
收藏
页码:2816 / 2821
页数:6
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