A new approach for MEMS power generation based on a piezoelectric diaphragm

被引：37

作者：

Kuehne, Ingo ^{[1
]}

Marinkovic, Djordje ^{[1
]}

Eckstein, Gerald ^{[1
]}

Seidel, Helmut ^{[2
]}

机构：

[1] Siemens AG, Corp Technol, D-81739 Munich, Germany

[2] Univ Saarland, Chair Micromech Microfluid Microactuators, D-66041 Saarbrucken, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2008年 / 142卷 / 01期

关键词：

power MEMS; energy converter; piezoelectric energy conversion; piezoelectric diaphragm;

D O I：

10.1016/j.sna.2007.04.031

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new approach of a MEMS power generator based on a piezoelectric diaphragm is presented. A MEMS design is introduced taking into account an optimum diaphragm thickness and a beneficial electrode structure. Moreover, experiments for small and large deflections demonstrate the functionality of the energy converter. Electrical measurements point out dependencies regarding electrical load, residual stress within the diaphragm and electrode design. The frequency response for small deflections and the time response for large deflections of the device are also determined. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：292 / 297

页数：6

共 19 条

[1]

AGAH M, 2002, DESIGN ANAL PIEZOELE

[2] Optimization of electromechanical coupling for a thin-film PZT membrane: II. Experiment [J].