Critical condition for growth of silicon nanowires

被引:56
作者
Dhalluin, Florian
Desre, Pierre J.
den Hertog, Martien I.
Rouviere, Jean-Luc
Ferret, Pierre
Gentile, Pascal
Baron, Thierry
机构
[1] Univ Grenoble 1, CEA, CNRS, Lab Technol Microelectron UMR 5129, F-38054 Grenoble, France
[2] CEA, LETI MINATEC, Lab Photon Silicium, F-38054 Grenoble, France
[3] CEA, DRFMC, Lab Etud Mat Microocop Avancee, F-38054 Grenoble, France
[4] CEA, DRFMC, Lab Silicium Nanoelect Photon Struct, F-38054 Grenoble, France
关键词
D O I
10.1063/1.2811935
中图分类号
O59 [应用物理学];
学科分类号
摘要
The existence of a critical radius on the growth of Si nanowires by the vapor-liquid-solid mechanism is examined. By varying the experimental growth parameters, we have shown a dependence of the minimum nanowires radius with the Si reactive species partial pressure, demonstrating that the critical radius is not a limited one. A thermodynamical model giving a quantitative aspect of the dependence of a critical nanowire diameter on Si supersaturation in a Au-Si droplet is proposed. These results open up a way to grow many kinds of nanowires with nanometric diameter. The size control has important implications for electronic and optical properties of nanowires based devices.
引用
收藏
页数:5
相关论文
共 28 条
[1]   A THERMODYNAMIC EVALUATION OF THE AU-GE AND AU-SI SYSTEMS [J].
CHEVALIER, PY .
THERMOCHIMICA ACTA, 1989, 141 :217-226
[2]   Functional nanoscale electronic devices assembled using silicon nanowire building blocks [J].
Cui, Y ;
Lieber, CM .
SCIENCE, 2001, 291 (5505) :851-853
[3]   Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species [J].
Cui, Y ;
Wei, QQ ;
Park, HK ;
Lieber, CM .
SCIENCE, 2001, 293 (5533) :1289-1292
[4]   High performance silicon nanowire field effect transistors [J].
Cui, Y ;
Zhong, ZH ;
Wang, DL ;
Wang, WU ;
Lieber, CM .
NANO LETTERS, 2003, 3 (02) :149-152
[5]   SIZE DEPENDENCE OF BAND-GAPS IN SILICON NANOSTRUCTURES [J].
DELLEY, B ;
STEIGMEIER, EF .
APPLIED PHYSICS LETTERS, 1995, 67 (16) :2370-2372
[6]  
DENHERTOG MI, 2007, UNPUB P 15 C MICR SE
[7]   FUNDAMENTAL ASPECTS OF VLS GROWTH [J].
GIVARGIZOV, EI .
JOURNAL OF CRYSTAL GROWTH, 1975, 31 (DEC) :20-30
[8]   The influence of the surface migration of gold on the growth of silicon nanowires [J].
Hannon, JB ;
Kodambaka, S ;
Ross, FM ;
Tromp, RM .
NATURE, 2006, 440 (7080) :69-71
[9]   Giant piezoresistance effect in silicon nanowires [J].
He, Rongrui ;
Yang, Peidong .
NATURE NANOTECHNOLOGY, 2006, 1 (01) :42-46
[10]   The density and coefficient of expansion of liquid gallium over a wide range of temperature [J].
Hoather, WH .
PROCEEDINGS OF THE PHYSICAL SOCIETY, 1936, 48 :699-707