Monitoring the quality of diamond films using Raman spectra excited at 514.5 nm and 633 nm

被引:202
作者
Sails, SR [1 ]
Gardiner, DJ [1 ]
Bowden, M [1 ]
Savage, J [1 ]
Rodway, D [1 ]
机构
[1] DRA,MALVERN,WORCS,ENGLAND
关键词
diamond; carbon; Raman; XPS;
D O I
10.1016/0925-9635(96)90031-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A relative Raman scattering cross-section has been experimentally determined for diamond and non-diamond carbon spectra excited by argon ion 514.5 nm radiation. This has been used to arrive at a semi-quantitative evaluation of diamond film quality. The results are compared with those obtained using helium-neon excitation at 633 nm.
引用
收藏
页码:589 / 591
页数:3
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