Evaluation of microfabricated deformable mirror systems

被引：6

作者：

Cowan, WD ^{[1
]}

Lee, MK ^{[1
]}

Bright, VM ^{[1
]}

Welsh, BM ^{[1
]}

机构：

[1] USAF, Inst Technol, Dept Elect & Comp Engn, ENG,AFIT, Wright Patterson AFB, OH 45433 USA

来源：

ADAPTIVE OPTICAL SYSTEM TECHNOLOGIES, PARTS 1 AND 2 | 1998年 / 3353卷

关键词：

micro-electro-mechanical systems (MEMS); micromirrors; adaptive optics; beam steering; deformable mirrors;

D O I：

10.1117/12.321696

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper presents recent results for aberration correction and beam steering experiments using polysilicon surface micromachined piston micromirror arrays. Microfabricated deformable mirrors offer a substantial cost reduction for adaptive optic systems. In addition to the reduced mirror cost, microfabricated mirrors typically require low control voltages (less than 30 volts), thus eliminating high voltage amplifiers. The greatly reduced cost per channel of adaptive optic systems employing microfabricated deformable mirrors promise high order aberration correction at low cost. Arrays of piston micromirrors with 128 active elements were tested. Mirror elements are on a 203 mu m 12x12 square grid (with 16 inactive elements, 4 in each corner of the array). The overall array size is 2.4 mm square. The arrays were fabricated in the commercially available DARPA supported MUMPs surface micromachining foundry process. The cost per mirror array in this prototyping process is less than $200. Experimental results are presented for a hybrid correcting element comprised of a lenslet array and piston micromirror array, and for a piston micromirror array only. Also presented is a novel digital deflection micromirror which requires no digital to analog converters, further reducing the cost of adaptive optics systems.

引用

页码：790 / 804

页数：15