High resolution soft x-ray microscopy

被引：3

作者：

Chao, WL ^{[1
]}

Anderson, EH ^{[1
]}

Denbeaux, G ^{[1
]}

Harteneck, B ^{[1
]}

Le Gros, M ^{[1
]}

Pearson, AL ^{[1
]}

Olynick, D ^{[1
]}

Attwood, D ^{[1
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA

来源：

SOFT X-RAY AND EUV IMAGING SYSTEMS | 2000年 / 4146卷

关键词：

x-ray microscope; XM-1; zone plate; resolution;

D O I：

10.1117/12.406671

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The XM-1 is a soft x-ray full-field microscope that uses zone plates for the condenser and objective lenses. One of the main features of XM-1 is the high spatial resolution, which is made possible by the fine features of the objective zone plate. At present, the microscope uses a zone plate with an outer zone width of 25 nm Several test patterns containing periodic lines and spaces were fabricated to measure the resolution of the microscope. Experimental data shows that the microscope can resolve 25 nm features. As simulations indicate that good contrast can be observed with even smaller features, test patterns with finer features are being fabricated to actually determine the resolution limit of the microscope.

引用

页码：171 / 175

页数：5