Micromirrors and micromirror arrays for scanning applications

被引：8

作者：

Gessner, T ^{[1
]}

Kurth, S ^{[1
]}

Kaufmann, C ^{[1
]}

Markert, J ^{[1
]}

Ehrlich, A ^{[1
]}

Dötzel, W ^{[1
]}

机构：

[1] Chemnitz Univ Technol, Ctr Microtechnol, D-09107 Chemnitz, Germany

来源：

MOEMS AND MINIATURIZED SYSTEMS | 2000年 / 4178卷

关键词：

micromirror; laser projection; spectrometer; dust monitoring;

D O I：

10.1117/12.396505

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The main focus of this contribution will be the description of already realised applications of micromirrors and micromirror arrays and future opportunities. As an example image projection and environmental monitoring will be discussed. The micro scanning elements where fabricated by using monacrystalline silicon and are convenient For continuous scanning with working frequencies between several 100 Hz up to 100 kHz.

引用

页码：338 / 347

页数：10