Low-resistance tunnel magnetoresistive head

被引:28
作者
Ohashi, K [1 ]
Hayashi, K [1 ]
Nagahara, K [1 ]
Ishihara, K [1 ]
Fukami, E [1 ]
Fujikata, J [1 ]
Mori, S [1 ]
Nakada, M [1 ]
Mitsuzuka, T [1 ]
Matsuda, K [1 ]
Mori, H [1 ]
Kamijo, A [1 ]
Tsuge, H [1 ]
机构
[1] NEC Corp Ltd, Fuchu, Tokyo 1838501, Japan
关键词
TMR head; spin-dependent tunneling; signal-to-noise ratio; in situ natural oxidation;
D O I
10.1109/20.908506
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A tunnel magnetoresistive (TMR) head with a low resistance of about 30 Omega and effective track width of 1.4 mum was fabricated using an in situ natural oxidation (ISNO) technique. Its read-output was almost the same as that expected from test elements at the wafer level. We found no large difference in noise voltages between TMR head and GMR head when their resistance was about 30 Omega. A very low-resistivity TMR element with a resistance-area product of 14 Omega . mum(2) and a fairly high DeltaR/R of 14% was also developed using ISNO, A signal-to-noise ratio consideration suggests that such low resistance is a key to TMR heads for high recording densities.
引用
收藏
页码:2549 / 2553
页数:5
相关论文
共 18 条
[1]   The electrical and magnetic response of yoke-type read heads based on a magnetic tunnel junction [J].
Coehoorn, R ;
Cumpson, SR ;
Ruigrok, JJM ;
Hidding, P .
IEEE TRANSACTIONS ON MAGNETICS, 1999, 35 (05) :2586-2588
[2]  
FONTANA RE, Patent No. 5729410
[3]   Microstructured magnetic tunnel junctions [J].
Gallagher, WJ ;
Parkin, SSP ;
Lu, Y ;
Bian, XP ;
Marley, A ;
Roche, KP ;
Altman, RA ;
Rishton, SA ;
Jahnes, C ;
Shaw, TM ;
Xiao, G .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (08) :3741-3746
[4]  
KOGAN S, 1996, ELECT NOISE FLUCTUAT, P160
[5]   Bias voltage and temperature dependence of magnetotunneling effect [J].
Lu, Y ;
Li, XW ;
Xiao, G ;
Altman, RA ;
Gallagher, WJ ;
Marley, A ;
Roche, K ;
Parkin, S .
JOURNAL OF APPLIED PHYSICS, 1998, 83 (11) :6515-6517
[6]   Voltage dependence of the magnetoresistance and the tunneling current in magnetic tunnel junctions [J].
Marley, AC ;
Parkin, SSP .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (08) :5526-5526
[7]   GIANT MAGNETIC TUNNELING EFFECT IN FE/AL2O3/FE JUNCTION [J].
MIYAZAKI, T ;
TEZUKA, N .
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1995, 139 (03) :L231-L234
[8]   Ferromagnetic-insulator-ferromagnetic tunneling: Spin-dependent tunneling and large magnetoresistance in trilayer junctions [J].
Moodera, JS ;
Kinder, LR .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (08) :4724-4729
[9]   Interface magnetism and spin wave scattering in ferromagnet-insulator-ferromagnet tunnel junctions [J].
Moodera, JS ;
Nowak, J ;
van de Veerdonk, RJM .
PHYSICAL REVIEW LETTERS, 1998, 80 (13) :2941-2944
[10]   LARGE MAGNETORESISTANCE AT ROOM-TEMPERATURE IN FERROMAGNETIC THIN-FILM TUNNEL-JUNCTIONS [J].
MOODERA, JS ;
KINDER, LR ;
WONG, TM ;
MESERVEY, R .
PHYSICAL REVIEW LETTERS, 1995, 74 (16) :3273-3276