MEMS-tunable vertical-cavity SOAs

被引：33

作者：

Cole, GD ^{[1
]}

Björlin, ES

Chen, Q

Chan, CY

Wu, SM

Wang, CS

MacDonald, NC

Bowers, JE

机构：

[1] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA

[2] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA

[3] VEECO Metrol LLC, Goleta, CA 93117 USA

[4] Univ So Calif, Dept Elect Engn, Los Angeles, CA 90089 USA

[5] Appl Optoelect Inc, Sugar Land, TX 77478 USA

来源：

IEEE JOURNAL OF QUANTUM ELECTRONICS | 2005年 / 41卷 / 03期

基金：

美国国家科学基金会;

关键词：

Fabry-Perot resonators; laser amplifiers; microelectromechanical devices; optical pumping; semiconductor optical amplifiers; surface-emitting lasers; tunable amplifiers; wafer bonding;

D O I：

10.1109/JQE.2004.841496

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present the signal gain, wavelength tuning characteristics, saturation properties, and noise figure (NF) of MEMS-based widely tunable vertical-cavity semiconductor optical amplifiers (VCSOAs) for various optical cavity designs, and we compare the theoretical results to data generated from a number of experimental devices. Using general Fabry-Perot relationships, it is possible to model both the wavelength tuning characteristics and the peak signal gain of tunable vertical-cavity amplifiers, while a rate-equation analysis is used to describe the saturation output power and NF as a function of the VCSOA resonant wavelength. Additionally, the basic design principles for an integrated electrostatic actuator are outlined. It is found that MEMS-tunable VCSOAs follow many of the same design trends as fixed-wavelength devices. However, with tunable devices, the effects of varying mirror reflectance and varying single-pass gain associated with the MEMS-based tuning mechanism lead to changing amplifier properties over the wavelength span of the device.

引用

页码：390 / 407

页数：18

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