Laser-induced activation of p-type GaN with the second harmonics of a Nd:YAG laser

被引:10
作者
Cheng, YC
Liao, CC
Feng, SW
Yang, CC
Lin, YS
Ma, KJ
Chou, CC
Lee, CM
Chyi, JI
机构
[1] Natl Taiwan Univ, Dept Elect Engn, Taipei 10764, Taiwan
[2] Natl Taiwan Univ, Grad Inst Electroopt Engn, Taipei 10764, Taiwan
[3] Chung Cheng Inst Technol, Dept Mech Engn, Taoyuan, Taiwan
[4] Natl Cent Univ, Dept Elect Engn, Chungli, Taiwan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2001年 / 40卷 / 4A期
关键词
Mg-doped GaN; p-type activation; thermal activation; laser-induced activation;
D O I
10.1143/JJAP.40.2143
中图分类号
O59 [应用物理学];
学科分类号
摘要
Magnesium-doped p-type GaN has been activated by irradiation with photons of 532 nm wavelength from the second harmonic of a Q-switched neodymium-doped ytterbium aluminum garnet (Nd:YAG) laser. With appropriate laser fluence levels and irradiation pulse numbers, such a laser-induced activation process resulted in a hole concentration about the same as that obtained through the conventional thermal activation technique. Temperature measurement revealed that the laser-induced process is very unlikely to be thermal. It was speculated that the process might involve the photon-induced breaking of the H-Ma bonds.
引用
收藏
页码:2143 / 2145
页数:3
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