Flexible hollow waveguides for delivery of excimer-laser light

被引：19

作者：

Matsuura, Y ^{[1
]}

Miyagi, M ^{[1
]}

机构：

[1] Tohoku Univ, Dept Elect Commun, Sendai, Miyagi 5808579, Japan

来源：

OPTICS LETTERS | 1998年 / 23卷 / 15期

关键词：

D O I：

10.1364/OL.23.001226

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A hollow waveguide consisting of a glass tube with a thin aluminum film on the inner surface is proposed for delivery of excimer-laser light. The waveguide, fabricated by a chemical-vapor-deposition method, shows low losses for KrF excimer laser light: the straight loss of a 1-mm-bore waveguide was 0.4 dB/m. (C) 1998 Optical Society of America.

引用

页码：1226 / 1228

页数：3

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