Short-pulse laser ablation of solids: From phase explosion to fragmentation

被引:277
作者
Lorazo, P
Lewis, LJ
Meunier, M
机构
[1] Ecole Polytech, Dept Genie Phys, Montreal, PQ H3C 3A7, Canada
[2] Ecole Polytech, Grp Rech Phys & Technol Couches Minces, Montreal, PQ H3C 3A7, Canada
[3] Univ Montreal, Grp Rech Phys & Technol Couches Minces, Montreal, PQ H3C 3J7, Canada
[4] Univ Montreal, Dept Phys, Montreal, PQ H3C 3J7, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
D O I
10.1103/PhysRevLett.91.225502
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The mechanisms of laser ablation in silicon are investigated close to the threshold energy for pulse durations of 500 fs and 50 ps. This is achieved using a unique model coupling carrier and atom dynamics within a unified Monte Carlo and molecular-dynamics scheme. Under femtosecond laser irradiation, isochoric heating and rapid adiabatic expansion of the material provide a natural pathway to phase explosion. This is not observed under slower, nonadiabatic cooling with picosecond pulses where fragmentation of the hot metallic fluid is the only relevant ablation mechanism.
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页数:4
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共 21 条
[1]  
Allen M. P., 1987, Computer Simulation of Liquids
[2]  
[Anonymous], 1990, FUNDAMENTALS CARRIER
[3]   GENERATION OF NONEQUILIBRIUM ELECTRON AND LATTICE TEMPERATURES IN COPPER BY PICOSECOND LASER-PULSES [J].
EESLEY, GL .
PHYSICAL REVIEW B, 1986, 33 (04) :2144-2151
[4]   Ab initio molecular dynamics simulation of liquid CdTe and GaAs: Semiconducting versus metallic behavior [J].
Godlevsky, VV ;
Derby, JJ ;
Chelikowsky, JR .
PHYSICAL REVIEW LETTERS, 1998, 81 (22) :4959-4962
[5]   Vapor-liquid equilibria of silicon by the gibbs ensemble simulation [J].
Honda, N ;
Nagasaka, Y .
INTERNATIONAL JOURNAL OF THERMOPHYSICS, 1999, 20 (03) :837-846
[6]   Contribution of vaporization and boiling to thermal-spike sputtering by ions or laser pulses [J].
Kelly, R ;
Miotello, A .
PHYSICAL REVIEW E, 1999, 60 (03) :2616-2625
[7]   Isotherms for the liquid-gas phase transition in silicon from NPT Monte Carlo simulations [J].
Makhov, DV ;
Lewis, LJ .
PHYSICAL REVIEW B, 2003, 67 (15)
[8]  
MALVEZZI AM, 1984, MATER RES SOC S P, V23, P135
[9]   CRITICAL-ASSESSMENT OF THERMAL MODELS FOR LASER SPUTTERING AT HIGH FLUENCES [J].
MIOTELLO, A ;
KELLY, R .
APPLIED PHYSICS LETTERS, 1995, 67 (24) :3535-3537
[10]   Molecular-dynamics study of ablation of solids under femtosecond laser pulses [J].
Perez, D ;
Lewis, LJ .
PHYSICAL REVIEW B, 2003, 67 (18)