Depth and lateral standards made of silicon

被引：4

作者：

Frühauf, J ^{[1
]}

Krönert, S ^{[1
]}

Brand, U ^{[1
]}

机构：

[1] Tech Univ Chemnitz, Fak Elektrotech & Informat Tech, D-09107 Chemnitz, Germany

来源：

TECHNISCHES MESSEN | 2001年 / 68卷 / 7-8期

关键词：

D O I：

10.1524/teme.2001.68.7-8.326

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Silicon micromachining is excellently suitable for the production of gauging structures. On this basis silicon standards were developed for the calibration of tactile and optical profile measurement instruments. These products feature dimensions typical for three-dimensional structures of microtechnologies: 1 mum to 1000 mum in depth and 10 mum to 62,5 mm in lateral dimensions. In addition the standards contain structures like gratings and abrupt vertical steps, which allow to control the resolution and the stylus.

引用

页码：326 / 332

页数：7

共 11 条

[1]

[Anonymous], 2000, 54361 ISO

[2]

[Anonymous], GRUNDLAGEN MIKROSYST

[3]

Berns H., 1998, HARTLEGIERUNGEN HART

[4]

Findler G., 1992, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots(Cat. No.92CH3093-2), P62, DOI 10.1109/MEMSYS.1992.187691

[5] Problems of contour measuring on microstructures using a surface profiler [J].

Fruhauf, J .

MEASUREMENT SCIENCE AND TECHNOLOGY, 1998, 9 (03) :293-296

[6]

HULL R, 1999, PROPERTIES CYRSTALLI

[7]

Nitzsche K, 1993, FUNKTIONSWERKSTOFFE, V2nd ed.

[8]

Scholze H, 1988, GLAS NATUR STRUKTUR

[9] STYLUS PROFILING AT HIGH-RESOLUTION AND LOW FORCE [J].

SONG, JF ;

VORBURGER, TV .

APPLIED OPTICS, 1991, 30 (01) :42-50

[10]

VONARDENNE M, 1973, TABELLEN ANGEW PHYSI, V2, P210

← 1 2 →