A MEMS-actuated tunable microdisk resonator

被引：4

作者：

Lee, MCM ^{[1
]}

Wu, MC ^{[1
]}

机构：

[1] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90024 USA

来源：

2003 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS | 2003年

关键词：

D O I：

10.1109/OMEMS.2003.1233451

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel tunable microdisk resonator with integrated MEEMS actuator to alter coupling gap is proposed and experimentally demonstrated for the first time. The fabricated device shows a transmittance change about 8dB and a quality factor of 6200.

引用

页码：28 / 29

页数：2

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