Dual-stage actuator system for magnetic disk drives using a shear mode piezoelectric microactuator

被引:91
作者
Koganezawa, S [1 ]
Uematsu, Y [1 ]
Yamada, T [1 ]
Nakano, H [1 ]
Inoue, J [1 ]
Suzuki, T [1 ]
机构
[1] Fujitsu Ltd, File Memory Lab, Atsugi, Kanagawa 2430197, Japan
关键词
dual-stage actuator; magnetic disk drives; microactuator; piezoelectric actuator; shear mode;
D O I
10.1109/20.753821
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We developed a novel piezoelectric microactuator for dual-stage actuator systems in magnetic disk drives. This microactuator is based on the shear deformation of piezoelectric elements, and drives the head suspension assembly. The actuator is suitable for thin devices, and is easily manufactured because bf its simple stack configuration. We installed the microactuator in a 2.5 " prototype drive, and evaluated the servo system of the dual-stage actuator. This paper describes the structure of our piezoelectric actuator, its mechanical characteristics, and the evaluation of the dual-stage actuator servo system.
引用
收藏
页码:988 / 992
页数:5
相关论文
共 11 条
[1]  
CHEUNG P, 1995, P ASME DSC, P1011
[2]  
FAN LS, 1995, IEEE T IND ELECTRON, V42, P222
[3]  
HORSLEY D, 1997, IEEE P MEMS WORKSH, P454
[4]  
IMAMURA T, 1996, TRANSVERSE MODE ELEC, P216
[5]  
IMAMURA T, 1993, ASME ADV INFO STORAG, P119
[6]   A flexural piggyback milli-actuator for over 5 Gbit/in(2) density magnetic recording [J].
Koganezawa, S ;
Takaishi, K ;
Mizoshita, Y ;
Uematsu, Y ;
Yamada, T ;
Hasegawa, S ;
Ueno, T .
IEEE TRANSACTIONS ON MAGNETICS, 1996, 32 (05) :3908-3910
[7]  
KOGANEZAWA S, IN PRESS IEEE T MAGN
[8]   A DUAL STAGE MAGNETIC DISK DRIVE ACTUATOR USING A PIEZOELECTRIC DEVICE FOR A HIGH TRACK DENSITY [J].
MORI, K ;
MUNEMOTO, T ;
OTSUKI, H ;
YAMAGUCHI, Y ;
AKAGI, K .
IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (06) :5298-5300
[9]  
NAKAMURA S, 1997, P INT C MICR INF PRE, P58
[10]   A new integrated suspension for pico-sliders (pico-CAPS) [J].
Ohwe, T ;
Watanabe, T ;
Yoneoka, S ;
Mizoshita, Y .
IEEE TRANSACTIONS ON MAGNETICS, 1996, 32 (05) :3648-3650