Design of a linear piezomotor with ultra-high stiffness and nanoprecision

被引：32

作者：

Ni, J ^{[1
]}

Zhu, ZQ ^{[1
]}

机构：

[1] Stevens Inst Technol, Dept Mech Engn, Hoboken, NJ 07030 USA

来源：

IEEE-ASME TRANSACTIONS ON MECHATRONICS | 2000年 / 5卷 / 04期

关键词：

linear piezomotor; monolithic flexure frame; nanoprecision; ultra-high stiffness;

D O I：

10.1109/3516.891056

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

An ultra-stiff nanoprecision linear piezomotor was recently designed for grinding application. This piezomotor consists of three high-voltage piezoelectric actuators integrated by a monolithic flexure frame. This monolithic frame was designed to have multiple functions such as protecting and preloading three piezoelectric actuators and withstanding all the shearing forces during operation. The monolithic frame as a motion mechanism eliminates the backlash problem. The stiffness distributions in certain directions over the frame were designed using the finite-element method.

引用

页码：441 / 443

页数：3

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