Buried refractive microlenses formed by selective oxidation of AlGaAs

被引：9

作者：

Blum, O

Lear, KL

Hou, HQ

Warren, ME

机构：

[1] Department 1312, MS0603, Sandia National Laboratories, Albuquerque, NM

来源：

ELECTRONICS LETTERS | 1996年 / 32卷 / 15期

关键词：

aluminium gallium arsenide; oxidation;

D O I：

10.1049/el:19960887

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The authors demonstrate a novel method of fabricating buried refractive microlenses formed by selective oxidation AlGaAs epitaxial layers on a GaAs substrate. By appropriate tailoring of the Al mole fraction in the vertical direction, a lens-shaped oxidation shape was achieved. Performance of the microlenses formed in this way was experimentally evaluated at 980 nm, and modelled theoretically.

引用

页码：1406 / 1408

页数：3

共 3 条

[1] VERTICAL-CAVITY SURFACE-EMITTING LASERS WITH INTEGRATED REFRACTIVE MICROLENSES [J].