An economic analysis of the deposition of electrochromic WO3 via sputtering or plasma enhanced chemical vapor deposition

The costs of manufacturing electrochromic WO3 thin films deposited by either radio frequency plasma enhanced chemical vapor deposition (PECVD) or DC reactive magnetron sputtering of metal targets were modeled. Both inline systems for large area glass substrates and roll-to-roll systems for flexible webs were compared. Costs of capital, depreciation, raw materials, labor, power, and other miscellaneous items were accounted for in the model. The results predict that on similar sized systems, PECVD can produce electrochromic WO3 for as little as one-third the cost, and have more than 10 times the annual production capacity of sputtering. While PECVD cost is dominated by raw materials, primarily WF6, sputtering cost is dominated by labor and depreciation. (c) 2005 Elsevier B.V. All rights reserved.