Phase-statistical method and device for high precise and high-efficiency angular measurements

被引：18

作者：

Portman, V

Peschansky, B

机构：

[1] Ben Gurion Univ Negev, Pearlstone Ctr Aeronaut Engn, Dept Mech Engn, IL-84105 Beer Sheva, Israel

[2] Placa Ltd, IL-76705 Rehovot, Israel

来源：

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2001年 / 25卷 / 04期

关键词：

angular measurement; optoelectronic instrument; accuracy;

D O I：

10.1016/S0141-6359(01)00084-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A method and device for precise large-scale angular measurements in precision manufacturing is described. High accuracy of the method results from phase measurements by permanent integration over the total circle of the grating scales. According to this method, dividing errors of two of three scales are summed up to zero and the dividing error of the third scale is significantly reduced. An optoelectronic device based on this method has been developed, produced, and tested, and its design and operation are described. The device consists of optical grating scales of regular accuracy. This results in simplification of the structure of the measuring device and increases its reliability. Testing of the experimental batch shows that the accuracy of the device is +/- 0.2 arcsec. Different setups of the measured equipment and examples of the real-life application are shown. (C) 2001 Elsevier Science Inc. All rights reserved.

引用

页码：309 / 315

页数：7

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