Polymeric micromechanical components with tunable stiffness

被引：29

作者：

Manias, E ^{[1
]}

Chen, J

Fang, N

Zhang, X

机构：

[1] Penn State Univ, University Pk, PA 16802 USA

[2] Univ Calif Los Angeles, Los Angeles, CA 90095 USA

来源：

APPLIED PHYSICS LETTERS | 2001年 / 79卷 / 11期

关键词：

D O I：

10.1063/1.1400084

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present a microstereolithographic technique that enables the manufacturing of polymeric components for microelectromechanical systems. Model microstructures were fabricated in the form of end-supported microbeams (10 mum in diameter), in order to characterize the mechanical properties of the produced structures at the micron scale. The flexural modulus of these microbeams was measured by atomic force microscopy, using cantilevers with attached metal spheres, and employed in a three-point bending geometry. Postfabrication treatment of the microstructures allows for the tailoring of their stiffness. (C) 2001 American Institute of Physics.

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页码：1700 / 1702

页数：3

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