New diffractive beam shaper generated with the aid of e-beam lithography

被引:9
作者
Golub, MA
Duparre, M
Kley, EB
Kowarschik, R
Ludge, B
Rockstroh, W
Fuchs, HJ
机构
[1] UNIV JENA,INST APPL OPT,D-07743 JENA,GERMANY
[2] UNIV JENA,INST APPL PHYS,D-07743 JENA,GERMANY
关键词
diffractive optics; binary optics; computer-generated holograms; electron-beam lithograph; beam shapers; measurements of intensity patterns;
D O I
10.1117/1.600697
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A diffractive optical element has been fabricated which converts a Gaussian CO2-laser beam into a flat-top rectangle. This was accomplished by enhanced photolithographic technology with e-beam generated masks. Experimental patterns of the shaped intensity for a single-mode CO2 laser are presented. (C) 1996 Society of Photo-Optical instrumentation Engineers.
引用
收藏
页码:1400 / 1406
页数:7
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